Formation of large area Al contacts on 6H- and 4H-SiC substrates
author
Korolkov, Oleg
Rang, Toomas
statement of authorship
O.Korolkov, T.Rang
source
Abstracts of the 3rd European Conference on Silicon Carbide and Related Materials : ECSCRM'2000 : Sept. 3-7, 2000, Kloster Banz, Germany
location of publication
Erlangen/Nurenberg
publisher
Friedrich Alexander University Press
year of publication
2000
pages
p. 188