Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture : scaling analysis of surface morphology
author
Podgurski, Vitali
Bogatov, Andrei
Sedov, V.
Sildos, Ilmo
Mere, Arvo
Viljus, Mart
Buijnsters, J. G.
Ralchenko, V.
statement of authorship
V. Podgursky, A. Bogatov, V. Sedov, I. Sildos, A. Mere, M. Viljus, J.G. Buijnsters, V. Ralchenko
source
Diamond and related materials
journal volume number month
Vol. 58
year of publication
2015
pages
p. 172-179 : ill
url
http://dx.doi.org/10.1016/j.diamond.2015.07.002
subject term
nanokristallid
õhukesed kiled
teemantkatted
vastupidavus
keyword
nanocrystalline diamond films
scaling
growth dynamics
roughness
atomic force microscopy
ISSN
0925-9635
notes
Bibliogr.: 26 ref
TTÜ department
materjalitehnika instituut
materjaliteaduse instituut
füüsikainstituut
materjaliuuringute teaduskeskus
language
inglise