Technonomics of manufacturing of silicon microsystems on WSI
author
Bubennikov, Alexander N.
Bubennikov, Alexander A.
statement of authorship
A.N.Bubennikov, A.A.Bubennikov
source
BEC'98 : the 6th Biennial Conference on Electronics and Microsystems Technology, October 7-9, 1998, Tallinn, Estonia : proceedings
location of publication
[Tallinn]
year of publication
1998
pages
p. 29-32: ill
ISBN
9985-59-081-3
notes
Bibl. 7 ref