Diffusion welded contacts for silicon semiconductor devices
author
Korolkov, Oleg
Rang, Toomas
statement of authorship
O. Korolkov, T. Rang
source
Proceedings of the International Conference and Exhibition Micro Materials : MicroMat '97, April 16-18, 1997, Berlin, Germany
location of publication
Dresden
publisher
DDP Goldenbogen
year of publication
1997
pages
p. 1035-1037
subject term
pooljuhtseadised
keevisliited
language
inglise