Interaction of point defects with impurities in the Si-SiO2 system and its influence on the properties of the interface
author
Kropman, Daniel
Mellikov, Enn
Lott, Kalju
Kärner, T.
Heinmaa, I.
statement of authorship
D.Kropman, E.Mellikov, K.Lott, T.Kärner, I.Heinmaa [et al.].
source
Getterring and defect engineering in semiconductor technology XIII : CADEST 2009 : proceedings of the XIIIth International Autumn Meeting, Döllnsee-Schorfheide, north of Berlin, Germany, September 26 - October 02, 2009
location of publication
Stafa-Zurich
publisher
Trans Tech Publications
year of publication
2010
pages
p. 145-148 : ill
url
https://www.sciencedirect.com/science/article/abs/pii/S0040609009014564
subject term
tuumamagnetresonants
elektronprotsessid
õhukesed kiled
defektid
notes
Bibliogr.: 3 ref
language
inglise