Silicon planar technology process modeling
author
statement of authorship
T. Rang, K. Tarnay, F. Masszi, J. Mizsei, P. Baji, G. Drozdy, B. Kovacs
source
Test methods in electronics technology : third International Spring Seminar on Electronics Technology, May 15-18, 1979, Balatonfüred, Hungary
location of publication
Budapest
publisher
year of publication
pages
p. 110-120
conference name, date
Third International Spring Seminar on Electronics Technology, May 15-18, 1979,
conference location
Balatonfüred, Hungary
subject term
TTÜ department
language
inglise
Rang, T., Tarnay, K., Masszi, F. et al. Silicon planar technology process modeling // Test methods in electronics technology : third International Spring Seminar on Electronics Technology, May 15-18, 1979, Balatonfüred, Hungary. Budapest : [s.n], 1979. p. 110-120.