Mask-defined abrasive-jet micromachining
author
Kruusing, Arvi
Leppävuori, Seppo
Uusimäki, Antti
Uusimäki, M.
statement of authorship
A. Kruusing, S. Leppävuori, A. Uusimäki, M. Uusimäki
source
MICRO SYSTEM Technologies 98 : 6th International Conference and Exhibition on Micro Electro, Opto, Mechanical Systems and Components : Potsdam, Germany, December 1-3, 1998
location of publication
Berlin
publisher
VDE Verlag GMBH
year of publication
1998
pages
p. 673-675
language
inglise