Growth surface morphology, and electrical resistivity of fully strained substoichiometric epitaxial TiN
x
(0.67 ≤ x < 1.0) layers on MgO(001)
author
Shin, C.-S.
Rudenja, Sergei
Gall, D.
Hellgren, N.
Lee, T.-Y.
Petrov, I.
Greene, J.E.
statement of authorship
C.-S.Shin, S.Rudenja, D.Gall, N.Hellgren, T.-Y.Lee, I.Petrov, and J.E.Greene
source
Journal of applied physics
journal volume number month
Volume 95
year of publication
2004
pages
1, p. 356-362 : ill
url
https://www.researchgate.net/publication/228927816_Growth_surface_morphology_and_electrical_resistivity_of_fully_strained_substoichiometric_epitaxial_TiN_067_x_10_layers_on_MgO_001
subject term
õhukesed kiled
elektritakistus
defektid
difusioon (füüsika)
ISSN
0021-8979
notes
Bibliogr.: 32 ref
language
inglise