Metallization technologies for wide band-gap semiconductor substrates : (invited paper)
author
Rang, Toomas
Korolkov, Oleg
Pikkov, Mihhail
statement of authorship
Toomas Rang, Oleg Korolkov, Mihhail Pikkov
source
Proceedings of the 6th Nexuspan Workshop Microsystems Technology Activities in Baltic Region : 23-24 April, 1999, Vilnius, Lithuania
location of publication
Kaunas
publisher
Technologija
year of publication
1999
pages
p. 27-30
subject term
pooljuhtseadised
tehnoloogia
metallitamine
language
inglise