Comparison of curvature and X-Ray methods for measuring of residual stresses in hard PVD coatings
author
Lille, Harri
Kõo, Jakub
Gregor, Andre
Ryabchikov, Alexander
Sergejev, Fjodor
Traksmaa, Rainer
Kulu, Priit
statement of authorship
Harri Lille, Jakub Kõo, Andre Gregor, Alexander Ryabchikov, Fjodor Sergejev, Rainer Traksmaa, Priit Kulu
source
Materials science forum
journal volume number month
Vol. 681, Residual Stresses VIII
year of publication
2011
pages
p. 455-460
series
Materials Science Forum
subject term
kattematerjalid
pindamine
õhukesed kiled
röntgenikiirgus
difraktsioon
keyword
curvature method
nc-(AlTi) N/a-Si3N4
PVD coating
thin film
TiAlN
TiCN
TiN
X-Ray Diffraction (XRD)
ISSN
1662-9752
language
inglise