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Use of atomic-force microscopy for characterization of silicon, implated with heavy ions at high doses

author
Angelov, Christo
Groudev, P.
Mikli, Valdek
statement of authorship
Ch. Angelov, P. Groudev, V. Mikli
source
Proceedings of 11th Conference "Materials for Information Tech. in the New Millenium" : ISCMP : Varna, 2001
location of publication
[S.l.]
year of publication
2001
pages
p. 460-464
language
inglise
Angelov, Ch., Groudev, P., Mikli, V. Use of atomic-force microscopy for characterization of silicon, implated with heavy ions at high doses // Proceedings of 11th Conference "Materials for Information Tech. in the New Millenium" : ISCMP : Varna, 2001. [S.l.], 2001. p. 460-464.