DLTS measurements on 4H-SiC JBS-diodes with boron implanted local p-n junctions
author
Ivanov, Pavel
Korolkov, Oleg
Samsonova, Tatyana
Sleptšuk, Natalja
Potapov, Alexander
Toompuu, Jana
Rang, Toomas
statement of authorship
Pavel Ivanov, Oleg Korolkov, Tatyana Samsonova, Natalja Sleptsuk, Alexander Potapov, Jana Toompuu, Toomas Rang
source
Materials science forum
journal volume number month
Vol. 679/680, Silicon Carbide and Related Materials 2010
year of publication
2011
pages
p. 409-412
conference name, date
Silicon Carbide and Related Materials 2010
keyword
deep level
DLTS measurements
JBS diodes
language
inglise