Creation of diffractive optical elements by one step e-beam lithography for optoelectronics and X-ray lithography
author
Aristov, V.V.
Dubonos, S.V.
Dyachenko, R.Ya.
Gaifullin, B.N.
Matveev, V.N.
Svintsov, A.A.
Zaitsev, S.I.
statement of authorship
V.V.Aristov, S.V.Dubonos, R.Ya.Dyachenko, B.N.Gaifullin, V.N.Matveev, A.A.Svintsov and S.I.Zaitsev
source
BEC'96 : the 5th Biennial Baltic Electronics Conference, October 7-11, 1996, Tallinn, Estonia : proceedings
location of publication
[Tallinn]
year of publication
1996
pages
p. 483-486: ill
ISBN
9985-59-026-0
notes
Bibl. 14 ref