Atomic layer deposition for hard nanocoatings
author
Jõgiaas, Taivo
Kollo, Lauri
Hussainova, Irina
statement of authorship
Taivo Jõgiaas, ..., Lauri Kollo, ... Irina Hussainova, ... [et al.]
source
Baltic ALD 2014 : 12th International Baltic Conference on Atomic Layer Deposition : May 12-13, 2014, Helsinki, Finland
location of publication
[S.l.]
year of publication
2014
pages
p. 91-92
conference name, date
12th International Baltic Conference on Atomic Layer Deposition, May 12-13, 2014
conference location
Helsinki, Finland
subject term
nanomaterjalid
õhukesed katted
aatomkihtsadestamine
TTÜ department
materjalitehnika instituut
language
inglise