Silicon integrated circuit fabrication process modeling and simulation
author
Rang, Toomas
Tarnay, K.
Mizsei, Janos
statement of authorship
T. Rang, K. Tarnay, J. Mizsei, P. Baji, B. Kovacs, G. Drozdy
source
Periodica polytechnica. Electrical engineering = Электротехника
publisher
Akademiai Kiado
journal volume number month
vol. 24, no. 1-2
year of publication
1980
pages
p. 109-113
url
https://www.ester.ee/record=b1198855*est
subject term
pooljuhtide tehnoloogia
integraallülitused
ISSN
0324-6000
TalTech department
elektroonika kateeder
language
inglise