Comparative ellipsometric and ion beam analytical studies on ion beam crystallized silicon implanted with Zn and Pb ions

statement of authorship
Tivador Lohner, Christo Angelov and Valdek Mikli
journal volume number month
516
year of publication
pages
22, p. 8009-8012
ISSN
0040-6090
language
inglise
Lohner, T., Angelov, C., Mikli, V. Comparative ellipsometric and ion beam analytical studies on ion beam crystallized silicon implanted with Zn and Pb ions // Thin solid films (2008) 516, 22, p. 8009-8012. https://www.sciencedirect.com/science/article/pii/S0040609008003660