Micro- and nano-E-beam lithography using PROXY
author
Aristov, V.V.
Dubonos, S.V.
Gaifullin, B.N.
Svintsov, A.A.
Zaitsev, S.I.
Raith, H.F.
statement of authorship
V.V.Aristov, S.V.Dubonos, B.N.Gaifullin, A.A.Svintsov, S.I.Zaitsev, H.F.Raith
source
BEC'96 : the 5th Biennial Baltic Electronics Conference, October 7-11, 1996, Tallinn, Estonia : proceedings
location of publication
[Tallinn]
year of publication
1996
pages
p. 121-124: ill
ISBN
9985-59-026-0
notes
Bibl. 13 ref