Interfaces to 6H-SiC substrates - technology and simulation

statement of authorship
Toomas Rang and Alfons Blum
journal volume number month
Vol. 3
year of publication
pages
4, p. 250-259: ill
ISSN
1406-0175
notes
Bibl. 14 ref
review
Kokkuvõte: 6H-SiC aluste kontaktid : tehnoloogia ja simuleerimine
language
inglise
Rang, T., Blum, A. Interfaces to 6H-SiC substrates - technology and simulation // Proceedings of the Estonian Academy of Sciences. Engineering (1997) Vol. 3, 4, p. 250-259: ill.