Contact manufacturing technologies for wide band-gap semiconductor materials (invited)

author
statement of authorship
T.Rang
location of publication
[Tallinn]
year of publication
pages
p. 17-28: ill
ISBN
9985-59-081-3
notes
Bibl. 90 ref
Rang, T. Contact manufacturing technologies for wide band-gap semiconductor materials (invited) // BEC'98 : the 6th Biennial Conference on Electronics and Microsystems Technology, October 7-9, 1998, Tallinn, Estonia : proceedings. [Tallinn], 1998. p. 17-28: ill.