Structural and electrical characterisation of high-k ZrO2 thin films deposited by chemical spray pyrolysis method
author
Oluwabi, Abayomi Titilope
Oja Acik, Ilona
Katerski, Atanas
Mere, Arvo
Krunks, Malle
statement of authorship
Abayomi T. Oluwabi, Ilona Oja Acik, Atanas Katerski, Arvo Mere, Malle Krunks
source
Thin Solid Films
publisher
Elsevier
journal volume number month
Vol. 662
year of publication
2018
pages
p. 129 - 136
url
https://doi.org/10.1016/j.tsf.2018.07.035
subject term
pihustamine
õhukesed kiled
dielektrilised omadused
oksiidid
keyword
chemical spray pyrolysis
dielectric properties
high-k oxides
thin films
zirconium oxide
ISSN
0040-6090
notes
Bibliogr.: 36 ref
scientific publication
teaduspublikatsioon
classifier
1.1
Scopus
https://www.scopus.com/sourceid/12347
https://www.scopus.com/record/display.uri?eid=2-s2.0-85050861714&origin=resultslist&sort=plf-f&src=s&sid=4e20fc566512faafe6a1b2ec2b66583e&sot=b&sdt=b&s=DOI%2810.1016%2Fj.tsf.2018.07.035%29&sl=25&sessionSearchId=4e20fc566512faafe6a1b2ec2b66583e&relpos=0
WOS
https://jcr.clarivate.com/jcr-jp/journal-profile?journal=THIN%20SOLID%20FILMS&year=2022
https://www.webofscience.com/wos/woscc/full-record/WOS:000441428800020
category (general)
Materials science
Materjaliteadus
Physics and astronomy
Füüsika ja astronoomia
category (sub)
Materials science. Metals and alloys
Materjaliteadus. Metallid ja sulamid
Physics and astronomy. Surfaces and interfaces
Füüsika ja astronoomia. Pinnad ja liidesed
Materials science. Surfaces, coatings and films
Materjaliteadus. Pinnad, katted ja kiled
Materials science. Materials chemistry
Materjaliteadus. Materjalide keemia
Materials science. Electronic, optical and magnetic materials
Materjaliteadus. Elektroonilised, optilised ja magnetilised materjalid
quartile
Q2
TalTech department
materjali- ja keskkonnatehnoloogia instituut
language
inglise
Reserch Group
Laboratory of thin film energy materials
,
Laboratory of chemical thin film technologies (until February 28, 2023)