Atomic layer deposition of high-k dielectrics on carbon nanoparticles
author
Tamm, Aile
Koel, Mihkel
Peikolainen, Anna-Liisa
statement of authorship
Aile Tamm, Anna-Liisa Peikolainen, ..., Mihkel Koel, ... [et al.]
source
Thin solid films
publisher
Elsevier
journal volume number month
538
year of publication
2013
pages
p. 16-20 : ill
url
https://doi.org/10.1016/j.tsf.2012.09.071
subject term
süsinikuühendid
nanostruktuursed materjalid
nanoosakesed
aatomkihtsadestamine
keyword
carbon nanoparticles
atomic layer deposition
laminated nanostructure
ISSN
0040-6090
notes
Bibliogr.: 15 ref
scientific publication
teaduspublikatsioon
classifier
1.1
Scopus
https://www.scopus.com/sourceid/12347
https://www.scopus.com/record/display.uri?eid=2-s2.0-84879079949&origin=resultslist&sort=plf-f&src=s&sot=b&sdt=b&s=DOI%2810.1016%2Fj.tsf.2012.09.071%29
WOS
https://jcr.clarivate.com/jcr-jp/journal-profile?journal=THIN%20SOLID%20FILMS&year=2013
https://www.webofscience.com/wos/woscc/full-record/WOS:000320584800004
category (general)
Materials science
Materjaliteadus
Physics and astronomy
Füüsika ja astronoomia
category (sub)
Materials science. Metals and alloys
Materjaliteadus. Metallid ja sulamid
Materials science. Surfaces, coatings and films
Materjaliteadus. Pinnad, katted ja kiled
Materials science. Electronic, optical and magnetic materials
Materjaliteadus. Elektroonilised, optilised ja magnetilised materjalid
Materials science. Materials chemistry
Materjaliteadus. Materjalide keemia
Physics and astronomy. Surfaces and interfaces
Füüsika ja astronoomia. Pinnad ja liidesed
quartile
Q1
TalTech department
keemiainstituut
language
inglise