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Diffusion welding technology for 6H-SiC substrates

author
Korolkov, Oleg
Rang, Toomas
statement of authorship
O.Korolkov, T.Rang
source
BEC'98 : the 6th Biennial Conference on Electronics and Microsystems Technology, October 7-9, 1998, Tallinn, Estonia : proceedings
location of publication
[Tallinn]
year of publication
1998
pages
p. 251-252: ill
ISBN
9985-59-081-3
notes
Bibl. 4 ref
Korolkov, O., Rang, T. Diffusion welding technology for 6H-SiC substrates // BEC'98 : the 6th Biennial Conference on Electronics and Microsystems Technology, October 7-9, 1998, Tallinn, Estonia : proceedings. [Tallinn], 1998. p. 251-252: ill.