Diffusion welding technology for 6H-SiC substrates
author
statement of authorship
O.Korolkov, T.Rang
location of publication
[Tallinn]
year of publication
pages
p. 251-252: ill
ISBN
9985-59-081-3
notes
Bibl. 4 ref
language
inglise
Korolkov, O., Rang, T. Diffusion welding technology for 6H-SiC substrates // BEC'98 : the 6th Biennial Conference on Electronics and Microsystems Technology, October 7-9, 1998, Tallinn, Estonia : proceedings. [Tallinn], 1998. p. 251-252: ill.