Evolution of TiN coating surface roughness during physical vapor deposition on high speed steel substrate

author
Kupchenko, Leonid
Tali, Rauno
statement of authorship
Leonid Kupchenko, Rauno Tali, Eron Adoberg, Valdek Mikli, Vitali Podgursky
location of publication
[S.l.]
year of publication
pages
p. 67-70
keyword
TiN coating
scaling exponents
ISSN
1013-9826
ISBN
978-3-03835-043-9
language
inglise
Kupchenko, L., Tali, R., Adoberg, E., Mikli, V., Podgurski, V. Evolution of TiN coating surface roughness during physical vapor deposition on high speed steel substrate // Engineering materials & tribology XXII. [S.l.] : Trans Tech Publications, 2014. p. 67-70. (Key engineering materials ; 604).