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Journal of vacuum science & technology A : vacuum, surfaces, and films (source)
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journal article EST
/
journal article ENG
Review article : recommended reading list of early publications on atomic layer deposition-outcome of the "Virtual Project on the History of ALD"
Ahvenniemi, Esko
;
Akbashev, Andrew R.
;
Ali, Saima
;
Rauwel, Erwan
Journal of vacuum science & technology A : vacuum, surfaces, and films
2017
/
p. 010801-1 - 010801-13
https://doi.org/10.1116/1.4971389
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journal article EST
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journal article ENG
Number of records 1, displaying
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keyword
19
1.
high-vacuum evaporation
2.
reactive vacuum sintering
3.
vacuum annealing
4.
Vacuum deposition
5.
vacuum forming
6.
vacuum hot pressing
7.
vacuum infusion process
8.
vacuum packaging
9.
vacuum pressureless sintering
10.
vacuum sintering
11.
vacuum treatment
12.
Vacuum weapons
13.
vacuum‐free process
14.
energy science and technology
15.
science and technology libraries
16.
science and technology parks
17.
science technology and innovation
18.
science technology innovation
19.
Science, Technology and Innovation Policy
subject term
2
1.
Norwegian University of Science and Technology
2.
The European Federation of Food Science and Technology (EFFoST)
author
1
1.
Department of Software Science, Tallinn University of Technology
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