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Getterring and defect engineering in semiconductor technology XIII : CADEST 2009 : proceedings of the XIIIth International Autumn Meeting, Döllnsee-Schorfheide, north of Berlin, Germany, September 26 - October 02, 2009 (source)
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book article
Interaction of point defects with impurities in the Si-SiO2 system and its influence on the properties of the interface
Kropman, Daniel
;
Mellikov, Enn
;
Lott, Kalju
;
Kärner, T.
;
Heinmaa, I.
Getterring and defect engineering in semiconductor technology XIII : CADEST 2009 : proceedings of the XIIIth International Autumn Meeting, Döllnsee-Schorfheide, north of Berlin, Germany, September 26 - October 02, 2009
2010
/
p. 145-148 : ill
https://www.sciencedirect.com/science/article/abs/pii/S0040609009014564
book article
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