Growth surface morphology, and electrical resistivity of fully strained substoichiometric epitaxial TiNx (0.67 ≤ x < 1.0) layers on MgO(001)Shin, C.-S.; Rudenja, Sergei; Gall, D.; Hellgren, N.; Lee, T.-Y.; Petrov, I.; Greene, J.E.Journal of applied physics2004 / 1, p. 356-362 : ill