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Atomic layer deposition for hard nanocoatings (title)
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book article
Atomic layer deposition for hard nanocoatings
Jõgiaas, Taivo
;
Kollo, Lauri
;
Hussainova, Irina
Baltic ALD 2014 : 12th International Baltic Conference on Atomic Layer Deposition : May 12-13, 2014, Helsinki, Finland
2014
/
p. 91-92
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atomic layer deposition
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atomic layer deposition (ALD)
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