Searching - TalTech Research Portal

Review article : recommended reading list of early publications on atomic layer deposition-outcome of the "Virtual Project on the History of ALD" (title)

—

—

—

—

Add criteria Advanced search filter

Clear

types of item

book ..

journal article ..

newspaper article ..

book article ..

dissertation ..

Open Access ..

Scientific publications ..

year

year of publication

Loading..

Loading..

TalTech department

Loading..

Loading..

Loading..

name of the person

Loading..

Loading..

Clear

export all inquiry results (1)
Save TXT fail

print
Open for editing with marked entries my bookmarks

display

sort
1

journal article EST / journal article ENG

Review article : recommended reading list of early publications on atomic layer deposition-outcome of the "Virtual Project on the History of ALD"Ahvenniemi, Esko; Akbashev, Andrew R.; Ali, Saima; Rauwel, ErwanJournal of vacuum science & technology A : vacuum, surfaces, and films2017 / p. 010801-1 - 010801-13 https://doi.org/10.1116/1.4971389 Journal metrics at Scopus Article at Scopus Journal metrics at WOS Article at WOS

journal article EST / journal article ENG

Number of records 1, displaying 1 - 1