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Influence of post-UV/ozone treatment of ultrasonic-sprayed zirconium oxide dielectric films for a low-temperature oxide thin film transistor (title)

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Influence of post-UV/ozone treatment of ultrasonic-sprayed zirconium oxide dielectric films for a low-temperature oxide thin film transistorOluwabi, Abayomi Titilope; Gaspar, Diana; Katerski, Atanas; Mere, Arvo; Krunks, Malle; Pereira, Luis; Oja Acik, IlonaMaterials2020 / art. 6, 14 p. : ill https://doi.org/10.3390/ma13010006 Journal metrics at Scopus Article at Scopus Journal metrics at WOS Article at WOS

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