Comparative study of siox layers deposition using thermal and uv-assisted curing of perhydropolysilazaneShmagina, Elizaveta; Bereznev, SergeiGSFMT Scientific Conference 2021 : Tartu, June 14-15, 2021 : abstracts2021 / P 50https://fmtdk.ut.ee/wp-content/uploads/2021/06/GSFMT_abstractbook_2021.pdf