Point defects interaction with extended defects and impurities and its influence on the Si-SiO2 system properties
Kropman, Daniel
;
Arbu, Uno
;
Kärner, T.
;
Ugaste, Ülo
;
Mellikov, Enn
;
Kauk, Marit
;
Heinmaa, I.
;
Samoson, Ago
;
Medvid, A.
Gettering and defect engineering in semiconductor technology. XI
2005
/
p. 333-338 : ill
https://www.researchgate.net/publication/243760197_Point_Defects_Interaction_with_Extended_Defects_and_Impurities_and_Its_Influence_on_the_Si-SiO_2_System_Properties