Comparative study of siox layers deposition using thermal and uv-assisted curing of perhydropolysilazane
statement of authorship
Elizaveta Shmagina, Sergei Bereznev
location of publication
Tartu
publisher
year of publication
pages
P 50
conference name, date
GSFMT Scientific Conference 2021, June 14-15, 2021
conference location
Tartu
Open Access
Open Access
scientific publication
teaduspublikatsioon
TTÜ department
language
inglise
subject term
classifier
Shmagina, E., Bereznev, S. Comparative study of siox layers deposition using thermal and uv-assisted curing of perhydropolysilazane // GSFMT Scientific Conference 2021 : Tartu, June 14-15, 2021 : abstracts. Tartu : Tartu Ülikool, 2021. P 50.