AFM and SEM investigations of ion beam synthesized Mg2Si precipitates in Si substrates

statement of authorship
Ch.Angelov, V.Mikli, B.Amov, E.Goranova
journal volume number month
Vol. 7
year of publication
pages
1, p. 369-373
Angelov, Ch., Mikli, V., Amov, B., Goranova, E.* AFM and SEM investigations of ion beam synthesized Mg2Si precipitates in Si substrates // Journal of optoelectronics and advanced materials (2005) Vol. 7, 1, p. 369-373.