On the early history of atomic layer deposition : most significant works and applications
statement of authorship
Jaan Aarik, Esko Ahvenniemi, Andrew R. Akbashev, Saima Ali, Mikhael Bechelany, Maria Berdova, Stefan Boyadjiev, David Cameron, Nikolai Chekurov, Mikhail Chubarov, Veronique Cremers, Anjana Devi, Viktor Drozd, Simon Elliott, Liliya Elnikova, Gloria Gottardi, Kestutis Grigoras, Dennis Hausmann, Cheol Seong Hwang, Marcel Junige, Shih-Hui Jen, Tanja Kallio, Jaana Kanervo, Ivan Khmelnitskiy, Do Han Kim, Lev Klibanov, Yury Koshtyal, Outi Krause, Jakob Kuhs, Irina Kärkkänen, Marja-Leena Kääriäinen, Tommi Kääriäinen, Luca Lamagna, Adam Lapicki, Markku Leskelä, Harri Lipsanen, Jussi Lyytinen, Anatoly Malkov, Anatoly Malygin, Christian Militzer, Jyrki Molarius, Małgorzata Norek, Cagla Ozgit-Akgun, Mikhail Panov, Henrik Pedersen, Luis Fabián Peña, Fabien Piallat, Georgi Popov, Riikka L. Puurunen, Alexander Pyymaki Perros, Geert Rampelberg, Robin H.A. Ras, Erwan Rauwel, Fred Roozeboom, Timo Sajavaara, Hossein Salami, Hele Savin, Nathanaelle Schneider, Thomas E. Seidel, Pia Sundberg, Jonas Sundqvist, Dmitry Suyatin, Massimo Tallarida, Tobias Törndahl, Mikko Utriainen, J. Ruud van Ommen, Thomas Wächtler, Claudia Wiemer, Oili M.E. Ylivaara, Oksana Yurkevich
source
16th International Conference on Atomic Layer Deposition : 24th-27th July 2016, Dublin, Ireland
location of publication
[Dublin]
publisher
Happening Conference and Events
year of publication
pages
[1] p
conference name, date
16th International Conference on Atomic Layer Deposition, 24-27 July, 2016
conference location
Dublin, Ireland
subject term
notes
Bibliogr.: 2 ref
TTÜ department
language
inglise
Aarik, J., Ahvenniemi E., Akbashev, A.R., Rauwel, E. et al. On the early history of atomic layer deposition : most significant works and applications // 16th International Conference on Atomic Layer Deposition : 24th-27th July 2016, Dublin, Ireland. [Dublin] : Happening Conference and Events, 2016. [1] p.