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Photometric detectors for chemical control equipment

author
Buschmann, Felix
Mädasson, Jaan
statement of authorship
F.Buschmann and J.Mädasson
source
Chair of Semiconductor Materials Technology : activity report, 1988-1993
location of publication
Tallinn
year of publication
1994
pages
p. 27
notes
(Reports of Tallinn Technical University ; K1)
Buschmann, F., Mädasson, J. Photometric detectors for chemical control equipment // Chair of Semiconductor Materials Technology : activity report, 1988-1993. Tallinn, 1994. p. 27.