On the early history of atomic layer deposition : most significant works and applicationsAarik, Jaan; Ahvenniemi, Esko; Akbashev, Andrew R.; Rauwel, Erwan16th International Conference on Atomic Layer Deposition : 24th-27th July 2016, Dublin, Ireland2016 / [1] p

Review article : recommended reading list of early publications on atomic layer deposition-outcome of the "Virtual Project on the History of ALD"Ahvenniemi, Esko; Akbashev, Andrew R.; Ali, Saima; Rauwel, ErwanJournal of vacuum science & technology A : vacuum, surfaces, and films2017 / p. 010801-1 - 010801-13 http://dx.doi.org/10.1116/1.4971389