Electrochemical evaluation of TiN coatingsRudenja, Sergei; Kulu, Priit; Talimets, Ellen; Mikli, Valdek; Straede, C.A.; Zwieg, T.Meeting abstracts / The Electrochemical Society and The International Society of Electrochemistry1997 / p. 1870

Electrochemical evaluation of TiN coatingsRudenja, Sergei; Kulu, Priit; Talimets, Ellen; Mikli, Valdek; Straede, C.A.; Zwieg, T.Proceedings of the Symposium on Interconnect and Contact Metallization1998 / p. 108-119 : ill