AFM and SEM investigations of ion beam synthesized Mg2Si precipitates in Si substratesAngelov, Christo; Mikli, Valdek; Amov, Blagoj; Goranova, E.Journal of optoelectronics and advanced materials2005 / 1, p. 369-373 Study of ion implanted Fe depth distribution in Si after pulsed ion beam treatmentAngelov, Christo; Georgiev, S.; Amov, Blagoj; Goranova, E.; Mikli, Valdek; Dezsi, I.; Kotai, E.Journal of optoelectronics and advanced materials2007 / 2, p. 307-310 https://www.researchgate.net/publication/289186791_Study_of_the_ion_implanted_Fe_depth_distribution_in_Si_after_pulsed_ion_beam_treatment