Comparative study of thin films prepared by different curing methods of perhydropolysilazaneShmagina, Elizaveta; Danilson, Mati; Mikli, Valdek; Bereznev, SergeiGraduate School of Functional Materials and Technology (GSFMT) Scientific Conference : abstracts2022 / art. 54 Graduate School of Functional Materials and Technology (GSFMT) Scientific Conference 2022