Reversible electrowetting on silanized silicon nitrideCahill, Brian; Giannitsis, Athanasios; Land, Raul; Gastrock, Gunter; Pliquett, Uwe; Frense, Dieter; Min, Mart; Beckmann, DieterSensors and actuators B. Chemical2010 / p. 380-386 : ill https://www.sciencedirect.com/science/article/pii/S092540050800885X