Electrochemical evaluation of TiN coatings
Rudenja, Sergei
;
Kulu, Priit
;
Talimets, Ellen
;
Mikli, Valdek
;
Straede, C.A.
;
Zwieg, T.
Proceedings of the Symposium on Interconnect and Contact Metallization
1998
/
p. 108-119 : ill