• Mask-defined abrasive-jet micromachiningKruusing, Arvi; Leppävuori, Seppo; Uusimäki, Antti; Uusimäki, M.MICRO SYSTEM Technologies 98 : 6th International Conference and Exhibition on Micro Electro, Opto, Mechanical Systems and Components : Potsdam, Germany, December 1-3, 19981998 / p. 673-675