Comparative study of thin films prepared by different curing methods of perhydropolysilazaneShmagina, Elizaveta; Danilson, Mati; Mikli, Valdek; Bereznev, SergeiGraduate School of Functional Materials and Technology (GSFMT) Scientific Conference : abstracts2022 / art. 54https://fmtdk.ut.ee/wp-content/uploads/2022/05/Conference-book-of-abstracts-2022.pdf