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Enhanced grain orientation in Sb2Se3 thin films deposited on Mo/BSG substrates via RF-sputtering and selenization

author
statement of authorship
Mehmet Ender Uslu, Katri Muska, Maris Pilvet, Sergei Bereznev, Valdek Mikli, Marit Kauk-Kuusik, Maarja Grossberg-Kuusk
source
publisher
journal volume number month
vol. 184
year of publication
pages
art. 108835
url
ISSN
1873-4081
1369-8001
notes
Bibliogr.: 25 ref
scientific publication
teaduspublikatsioon
language
inglise
Uslu, M. E., Muska, K., Pilvet, M., Bereznev, S., Mikli, V., Kauk-Kuusik, M., Grossberg-Kuusk, M. Enhanced grain orientation in Sb2Se3 thin films deposited on Mo/BSG substrates via RF-sputtering and selenization // Materials science in semiconductor processing (2024) vol. 184, art. 108835. https://doi.org/10.1016/j.mssp.2024.108835