Mechanical properties of aluminum, zirconium, hafnium and tantalum oxides and their nanolaminates grown by atomic layer deposition
autor
vastutusandmed
Taivo Jõgiaas, Roberts Zabels, Aile Tamm, Maido Merisalu, Irina Hussainova, ... [et al.]
allikas
ajakirja aastakäik number kuu
Vol. 282
ilmumisaasta
leheküljed
p. 36-42 : ill
võtmesõna
instrumented nano-indentation
metal oxide nano-laminates
ISSN
0257-8972
märkused
Bibliogr.: 30 ref
TTÜ struktuuriüksus
keel
inglise
Jõgiaas, T., Zabels, R., Tamm, A., Merisalu, M., Hussainova, I. et al. Mechanical properties of aluminum, zirconium, hafnium and tantalum oxides and their nanolaminates grown by atomic layer deposition // Surface and coatings technology (2015) Vol. 282, p. 36-42 : ill. http://dx.doi.org/10.1016/j.surfcoat.2015.10.008