Mechanical and tribological properties of 100-nm thick alumina films prepared by atomic layer deposition on Si(100) substrates

statement of authorship
Asad Alamgir, Andrei Bogatov, Maxim Yashin, and Vitali Podgursky
journal volume number month
vol. 68, 2
year of publication
pages
p. 126-130 : ill
conference name, date
Modern Materials and Manufacturing 2019 (MMM 2019), April 24-26, 2019
conference location
Tallinn
ISSN
1736-6046
notes
Kokkuvõte: Si(100) substraatidele aatomkihtsadestamisel valmistatud 100 nm paksusega Al2O3kilede mehaanilised ja triboloogilised omadused
Bibliogr.: 13 ref
Open Access
Open Access
scientific publication
teaduspublikatsioon
classifier
1.1
category (general)
kvartiil
Q2
language
inglise
Alamgir, A., Bogatov, A., Yashin, M., Podgurski, V. Mechanical and tribological properties of 100-nm thick alumina films prepared by atomic layer deposition on Si(100) substrates // Proceedings of the Estonian Academy of Sciences (2019) vol. 68, 2, p. 126-130 : ill. https://doi.org/10.3176/proc.2019.2.01 http://www.kirj.ee/public/proceedings_pdf/2019/issue_2/proc-2019-2-126-130.pdf