Mechanical and tribological properties of 100-nm thick alumina films prepared by atomic layer deposition on Si(100) substrates
statement of authorship
Asad Alamgir, Andrei Bogatov, Maxim Yashin, and Vitali Podgursky
publisher
journal volume number month
vol. 68, 2
year of publication
pages
p. 126-130 : ill
conference name, date
Modern Materials and Manufacturing 2019 (MMM 2019), April 24-26, 2019
conference location
Tallinn
url
ISSN
1736-6046
notes
Kokkuvõte: Si(100) substraatidele aatomkihtsadestamisel valmistatud 100 nm paksusega Al2O3kilede mehaanilised ja triboloogilised omadused
Bibliogr.: 13 ref
Open Access
Open Access
scientific publication
teaduspublikatsioon
language
inglise
subject term
keyword
classifier
kvartiil
category (general)
category (sub)
TTÜ department
Alamgir, A., Bogatov, A., Yashin, M., Podgurski, V. Mechanical and tribological properties of 100-nm thick alumina films prepared by atomic layer deposition on Si(100) substrates // Proceedings of the Estonian Academy of Sciences (2019) vol. 68, 2, p. 126-130 : ill.