Comparative study of siox layers deposition using thermal and uv-assisted curing of perhydropolysilazane

statement of authorship
Elizaveta Shmagina, Sergei Bereznev
location of publication
Tartu
publisher
year of publication
pages
P 50
conference name, date
GSFMT Scientific Conference 2021, June 14-15, 2021
conference location
Tartu
Open Access
Open Access
scientific publication
teaduspublikatsioon
classifier
5.2
language
inglise
Shmagina, E., Bereznev, S. Comparative study of siox layers deposition using thermal and uv-assisted curing of perhydropolysilazane // GSFMT Scientific Conference 2021 : Tartu, June 14-15, 2021 : abstracts. Tartu : Tartu Ülikool, 2021. P 50. https://fmtdk.ut.ee/wp-content/uploads/2021/06/GSFMT_abstractbook_2021.pdf