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Design and optimization of AlN based RF MEMS switches

author
statement of authorship
Mehadi Hasan Ziko and Ants Koel
source
journal volume number month
vol. 362, 1
year of publication
pages
012002 ; 9 p.: ill
conference name, date
International Conference on Smart Engineering Materials : ICSEM 2018 : March 7-9, 2018
conference location
Bucharest, Romania
url
ISSN
1757-8981
notes
Bibliogr.: 11 ref
Open Access
Open Access
scientific publication
teaduspublikatsioon
language
inglise
Reserch Group
Cognitronic lab-on-a-chip research group
Research laboratory for cognitronics
Ziko, M.H., Koel, A. Design and optimization of AlN based RF MEMS switches // IOP conference series : materials science and engineering (2018) vol. 362, 1, 012002 ; 9 p.: ill. https://doi.org/10.1088/1757-899X/362/1/012002