A DLTS study of 4H-SiC-based p-n junctions fabricated by boron implantation
author
Ivanov, Pavel
Potapov, Alexander
Samsonova, Tatyana
Korolkov, Oleg
Sleptšuk, Natalja
statement of authorship
P. A. Ivanov, A. S. Potapov, T. P. Samsonova, O. Korol’kov, and N. Sleptsuk
source
Semiconductors
journal volume number month
Vol. 45, 10
year of publication
2011
pages
p. 1306-1310 : ill
url
https://doi.org/10.1134/S1063782611100101
subject term
räniühendid
siirdeprotsessid
boor
pooljuhid
ISSN
1063-7826
notes
Bibliogr.: 13 ref
language
inglise