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Mechanical properties of aluminum, zirconium, hafnium and tantalum oxides and their nanolaminates grown by atomic layer deposition

author
statement of authorship
Taivo Jõgiaas, Roberts Zabels, Aile Tamm, Maido Merisalu, Irina Hussainova, ... [et al.]
source
publisher
journal volume number month
Vol. 282
year of publication
pages
p. 36-42 : ill
url
ISSN
0257-8972
notes
Bibliogr.: 30 ref
scientific publication
teaduspublikatsioon
language
inglise
Jõgiaas, T., Zabels, R., Tamm, A., Merisalu, M., Hussainova, I. et al. Mechanical properties of aluminum, zirconium, hafnium and tantalum oxides and their nanolaminates grown by atomic layer deposition // Surface and coatings technology (2015) Vol. 282, p. 36-42 : ill. https://doi.org/10.1016/j.surfcoat.2015.10.008